| 加热模块 |
zui大温度: 1200℃ 加热区域长度: 270 mm 恒定加热区域: 100 mm 管子尺寸: 60 mm (dia) x 1250 mm (lenght) |
|---|---|
| 射频功率模块 |
输出功率: 0 - 300 W 稳定性: +/- 0.1% 频率: 13.56 MHz zui大功率: 120 W |
| 真空模块 |
< 50 Pa for low vacuum module < 1 Pa for medium vacuum module < 0.005 Pa for high vacuum module |
| 气体混合模块 |
up to 4 channels with digital displayed mass flow meter Gas Flow Range: 0 - 200 sccm Gas Flow Accuracy: +/- 1.5% F.S. |
| Temperature Control |
PID Control - self-tuning 30 Segments Program N-type Thermal Couple Temperature Accuracy: +/- 1℃ |
